Roundness deviation (µm+µm/mm measuring height) * |
0,015 + 0,0003 |
Measuring path, motorized Z (mm) |
250 |
Straightness deviation / 100 mm measuring path (µm)**, Z axis |
0.15 |
Straightness deviation / total measuring path (µm)**, Z axis |
0.3 |
Parallelism deviation Z-/C axis in tracing direction, measuring path (µm) |
0.5 |
Measuring speed (mm/s), Z axis |
0.5-30 |
Positioning speed (mm/s), Z axis |
0,5-100 |
Roundness deviation (µm+µm/mm measuring height) ** |
0,03 + 0,0006 |
Axial runout deviation (µm+µm/mm measuring radius) * |
0,02 + 0,0001 |
Axial runout deviation (µm+µm/mm measuring radius) ** |
0,04 + 0,0006 |
Centering and tilting table |
manual |
Table diameter (mm) |
160 |
Table load capacity, centered (N) |
200 |
Speed (rpm) 50 Hz / 60 Hz |
0.2-15 |
Footer text |
* Values as maximum deviation from LSC reference circle, filter 15 undulations/revolution.
** All values in accordance with DIN ISO 1101 at 20°C ±1°C in a vibration-neutral environment, filter 15 undulations/revolution LSC or 2.5 mm LSS, 5 rpm or 5 mm/s and standard probe arm with ball diameter 3 mm. Proof at the standard using error separation techniques. Given the number of different options available, only a few machines are described here by way of example. Technical data for “your” MMQ is available from Mahr on request. |